Oxygen Analyzer for Semiconductors, Electronic Components
MS-500, LC-450A, LC-450D, LC-860
Model: MS-500
- Capable of measuring up to 8 points simultaneously
- Displays wide range of concentrations, from ppm level to 100%
- Best for mounting in semiconductor manufacturing equipment, vacuum equipment, etc.
- Direct insertion type sensor (NW 16/25/40 flange for vacuum )
- Special coating used on high durable sensors for greater durability
MS-500 specifications
| Measurement principle | Zirconia concentration cell type | ||
|---|---|---|---|
| Type | Separate-type (converter: wall-mounted; sensor: direct insertion type) | ||
| Display system | 4-digit digital display (concentration display) | ||
| Measurement range | 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2 10-20～10-0atm Automatic range | ||
| Repeatability | Within ±0.5% of full scale; range of 0-1% or more Within ±1% of full scale or ±0.1 ppm, whichever is larger; range of less than 0-1% Concentrations in the 0-1 ppm, atm range are out of warranty. | ||
| Number of measurement points | 1～8 | ||
| Sample gas requirements | Pressure | 10-3to 200KPa (absolute pressure) | |
| Flow rate | 0.5 to 5,000 mL/min or 0 mL/min (measurement in state of natural dispersion) | ||
| Humidity | Dew point below ambient temperature | ||
| Temperature | 0 to 100°C | ||
| Others | Must not contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable substances (including gas), oil or moisture | ||
| Reference gas | Atmosphere | ||
| Recorder output | Transmission output only | ||
| Transmission output | RS-232C | ||
| Alarm output | None | ||
| Warmup time | 6 minutes or less | ||
| Dimensions | MS-500(controller) | 92 mm (W) ×44 mm (H)×120 mm (D) (excluding projecting parts) | |
| MS-510(converter) | 100 mm (W) ×40 mm (H)×88 mm (D) (excluding projecting parts) | ||
| Sensor unit | SD16NW | Overall length 100mm(sensor ⌀ 11×39,body ⌀ 40×51) | |
| SD25NW | Overall length 100mm(sensor ⌀ 11×42,body ⌀ 40×48) | ||
| SD40NW | Overall length 100mm(sensor ⌀ 11×41,body ⌀ 40×49) | ||
| Weight | MS-500(controller) | Approx. 0.6 kg | |
| MS-510(converter) | Approx. 0.5 kg | ||
| Sensor unit | SD16NW | Approx. 0.2 kg | |
| SD25NW | Approx. 0.2 kg | ||
| SD40NW | Approx. 0.35 kg | ||
| External connection | Any of the vacuum flanges (NW16, 25, or 40) | ||
| Power | 24VDC±10% | ||
